Vacuum plasma processes

1. Plasma microwave (MW) generator

Assembly 1A

• MW generator – head (MWG-850-H)
• pulse MW generator with adjustable signal – source (MWG-850-AS)
• optional accessories – preregulator 300V(DC) (PRG-300-DC)

Assembly 1B

• MW generator – head (MWG-850-H)
• pulse MW generator with fixed signal 50 Hz – source (MWG-850-50) (low-cost model)